{"id":1949,"date":"2023-05-24T15:17:59","date_gmt":"2023-05-24T07:17:59","guid":{"rendered":"http:\/\/hce.pro.demo.coodemo.com\/?p=1949"},"modified":"2023-06-15T22:55:32","modified_gmt":"2023-06-15T14:55:32","slug":"samsung-crashes-through-3nm-scaling-barriers-with-new-mbcfet-architecture","status":"publish","type":"post","link":"https:\/\/www.hceics.com\/pt\/samsung-crashes-through-3nm-scaling-barriers-with-new-mbcfet-architecture\/","title":{"rendered":"Samsung Crashes Through 3nm Scaling Barriers With New MBCFET Architecture"},"content":{"rendered":"
The semiconductor industry’s history is largely the history of scaling down node sizes defined by\u00a0Moore’s Law<\/a>. This trend, beginning roughly in the 1960s, has continued with seeming ease over the decades that followed, until recent years when the industry has hit a wall.<\/p>\n Around the 7 nm node, scaling became extremely difficult, as new considerations like quantum effects and fabrication challenges have limited our ability to scale as easily as we once did.<\/p>\n <\/p>\n <\/p>\n Taking on this challenge, Samsung has made major news in the industry as it announced it had become the\u00a0first to start production of a 3 nm process<\/a>.<\/p>\n In this article, we’ll look at some of the challenges in scaling, Samsung’s new multi-bridge-channel FET (MBCFET) technology, and the news of its newest process node.<\/p>\n <\/p>\n As scaling of transistor node sizes started reaching extremes around the early 2010s, the industry began facing significant challenges in terms of MOSFET performance, control, and fabrication.<\/p>\n Specifically,\u00a0as the transistor scaled down<\/a>, concerns such as short channel effects and subthreshold leakages became greater as channel lengths decreased.<\/p>\n To address this, engineers had to replace conventional planar MOSFETs, and\u00a0Intel introduced the solution in 2011<\/a>\u00a0as the\u00a0FinFET<\/a>. The FinFET allowed for the effective channel width of the MOSFET to increase significantly, which ultimately helped control the short-channel behavior and the device’s subthreshold leakages.<\/p>\n <\/p>\n <\/p>\n However, as scaling continued,\u00a0FinFETs also needed to evolve<\/a>. To continue using FinFET technology to realize performance gains while shrinking size, major factors have included fin width scaling for better gate controllability, fin pitch scaling for capacitance reduction, and fin height increases for DC increases.<\/p>\n <\/p>\n <\/p>\n Today, the industry has evolved to using gate-all-around (GAA) MOSFETs, which provide greater capacitive coupling between the gate and the channel. GAA FETs, today, are often based on nanowires, where a number of wire layers are piled up to increase the total channel width.<\/p>\n Despite this solution, most of the industry is struggling with a lack of process margin in areas such as fin etching, cutting, and leaning. This problem has been one of the largest challenges for the industry to reach beyond the 5 nm node.<\/p>\n <\/p>\n Now, Samsung has broken through the barriers to continual scaling, as it has recently announced that it has begun production of its 3 nm process. According to Samsung, the key technology that has allowed it to reach this point is its newest\u00a0MOSFET architecture<\/a>, the MBCFET.<\/p>\n An MBCFET can be classified as a GAA technology; however, it deviates from the industry standard of using nanowires and instead uses a sheet-type structure with a greater width than a wire. By utilizing a nanosheet instead of a nanowire, MBCFETs can offer several key advantages, such as continuous channel width adjustment by controlling sheet width.<\/p>\n Along with this, the MBCFET could offer a structural change enabling all four sides of the device to act as a channel.<\/p>\n <\/p>\n <\/p>\n<\/p>\n
An example of TSMC’s node scale. Image used courtesy of\u00a0TSMC<\/a><\/em><\/h5>\n
History of Scaling Down<\/h3>\n
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A planar (left) vs FinFET (right) architectures.\u00a0Image used courtesy of\u00a0Lam Research<\/a><\/em><\/h5>\n
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The evolution of MOSFET architectures. Image used courtesy of\u00a0Sun et al<\/a><\/em><\/h5>\n
Samsung Reaches 3 nm with MBCFET<\/h3>\n
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MBCFETs utilize nanosheets as opposed to nanowires. Image used courtesy of\u00a0Samsung<\/a><\/em><\/h5>\n